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Controlling the shape and gap width of silicon electrodes using local anodic oxidation and anisotropic TMAH wet etching

Saeid Kakooei, (2012) Controlling the shape and gap width of silicon electrodes using local anodic oxidation and anisotropic TMAH wet etching. [Citation Index Journal]

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Item Type:Citation Index Journal
ID Code:9070
Deposited By: Ms Sharifah Fahimah Saiyed Yeop
Deposited On:19 Mar 2013 06:23
Last Modified:07 Apr 2013 03:12

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