Controlling the shape and gap width of silicon electrodes using local anodic oxidation and anisotropic TMAH wet etching

Saeid Kakooei (2012) Controlling the shape and gap width of silicon electrodes using local anodic oxidation and anisotropic TMAH wet etching. [Citation Index Journal]

Full text not available from this repository.

Item Type:	Citation Index Journal
Depositing User:	Ms Sharifah Fahimah Saiyed Yeop
Date Deposited:	19 Mar 2013 06:23
Last Modified:	07 Apr 2013 03:12
URI:	http://scholars.utp.edu.my/id/eprint/9070

Actions (login required)

View Item