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Finite Element Analysis of a Mass-Sensitive CMOS-MEMS Resonator using CoventorWare Simulation Software

Dennis , John Ojur and Ahmed, Abdelaziz Yousif and Md Khir, Mohd Haris and Mohamad Saad, Mohamad Naufal (2012) Finite Element Analysis of a Mass-Sensitive CMOS-MEMS Resonator using CoventorWare Simulation Software. In: 2012 4th International Conference on Intelligent and Advanced Systems (ICIAS2012), 12 - 14 June 2012, Convention Centre, Kuala Lumpur, Malaysia.

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Abstract

The finite element analysis of a mass-sensitive CMOS-MEMS resonator using architect is presented in this paper. The principle of detection of the gaseous species is based on the change in resonant frequency of the microresonator as a result of the absorption/adsorption of an analyte molecule onto the surface of the active material deposited on the microresonator resulting into a change of the mass of the microresonator device. CoventorWare simulation software is used to design and simulate the micromachined resonator gas sensing platform/membrane. From simulation, the resonant frequency of the resonator is found to be 6.45 kHz and 23 kHz for mode 1 and mode 2 (in y and z direction), respectively. The frequency increases with decrease in the length of the beam. On the other hand the frequency decreases with increasing mass on the top of the CMOS-MEMS resonator. The sensitivity is determined to be 0.18 Hz/pg.

Item Type:Conference or Workshop Item (Paper)
Subjects:T Technology > TK Electrical engineering. Electronics Nuclear engineering
Academic Subject One:CMOS MEMS Resonators
Departments / MOR / COE:Departments > Fundamental & Applied Sciences
ID Code:8799
Deposited By: Dr John Ojur Dennis
Deposited On:16 Jan 2013 02:07
Last Modified:16 Jan 2013 02:07

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