Design and modeling of a CMOS-MEMS capacitive resonator based on bonded-dies for gas detection

This paper presents a capacitive CMOS-MEMS resonator for mass detection. Mass detection is used in many applications such as chemical industries and biomedical diagnosis. The technique used for this work is two dies bonded in parallel direction to get change in the capacitance whenever there is a change in mass and the device is electro-statically actuated. The resonance frequency of the resonator without polymer layer is found to be 17.195 kHz. The mass sensitivity and gas sensitivity are found to be 3.78 μHz/fg and 26.99 μHz/ppb, respectively. The damping ratio is found to be 1.44 in air due to squeeze film damping. © 2014 IEEE.