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Characterization and modeling of 3-D vibration modes of a micromachined u-shaped cantilever

Dennis , John Ojur and Talha , W.A. and Hamid , N.H.B. (2009) Characterization and modeling of 3-D vibration modes of a micromachined u-shaped cantilever. In: 2009 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, MEMS/MOEMS 2009, 1 April 2009 through 3 April 2009, Rome.

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Abstract

The present work explores the potential applicability of the Lorentz force actuation of a micromachined U-shaped cantilever device for 3-D vector magnetic field measurements in a broad range of frequencies. The structures simulated are made entirely from aluminum and designed using CMOS fabrication technology and bulk micromachining in CoventorWare simulation environment. Analytical models describing 3-D cantilever vibration modes that are actuated by the Lorentz force and their verification by simulation is discussed. Results show that the resonant frequencies for mode 1 and 2 increase with increasing thickness of the cantilever while it is independent of the thickness for mode 3. On the other hand the resonant frequency for mode 3 increases with increasing width of the cantilever while it is independent of width for mode 1 and 2. It is also observed that the displacement of the cantilever for identical applied Lorentz force is highest, indicated highest sensitivity, for mode 1 and lowest for mode 3. ©EDA Publishing/DTIP 2009.

Item Type:Conference or Workshop Item (Paper)
Uncontrolled Keywords:Analytical model; Bulk- micromachining; Cantilever devices; Cantilever vibrations; CMOS fabrication technology; CoventorWare; Micromachined; Resonant frequencies; Simulation environment; U-shaped; Vector magnetic fields; Vibration modes; Alumina; Atomic force microscopy; Lorentz force; Magnetic field effects; Magnetic field measurement; Nanocantilevers; Natural frequencies; Vibrating conveyors; Vibration analysis; Three dimensional
Subjects:T Technology > TK Electrical engineering. Electronics Nuclear engineering
Departments / MOR / COE:Departments > Electrical & Electronic Engineering
ID Code:310
Deposited By: Dr John Ojur Dennis
Deposited On:04 Mar 2010 02:28
Last Modified:19 Jan 2017 08:25

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