A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

Algamili, A.S. and Khir, M.H.M. and Dennis, J.O. and Ahmed, A.Y. and Alabsi, S.S. and Ba Hashwan, S.S. and Junaid, M.M. (2021) A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices. Nanoscale Research Letters, 16 (1).

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Abstract

Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting them into analogue or digital forms. The sensor transforms these variations into a form which can be utilized as a marker to monitor the device variable. MEMS exhibits excellent feasibility in miniaturization sensors due to its small dimension, low power consumption, superior performance, and, batch-fabrication. This article presents the recent developments in standard actuation and sensing mechanisms that can serve MEMS-based devices, which is expected to revolutionize almost many product categories in the current era. The featured principles of actuating, sensing mechanisms and real-life applications have also been discussed. Proper understanding of the actuating and sensing mechanisms for the MEMS-based devices can play a vital role in effective selection for novel and complex application design. © 2021, The Author(s).

Item Type: Article
Impact Factor: cited By 14
Uncontrolled Keywords: MEMS, Batch fabrication; Complex applications; Low-power consumption; MEMS-based sensors; Micro electromechanical system (MEMS); Product categories; Real-life applications; Sensing mechanism, Microelectromechanical devices
Depositing User: Ms Sharifah Fahimah Saiyed Yeop
Date Deposited: 25 Mar 2022 06:51
Last Modified: 25 Mar 2022 06:51
URI: http://scholars.utp.edu.my/id/eprint/30423

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