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Test of a new tip material for Langmuir probe diagnostic

Naz, M.Y. and Shukrullah, S. and Ghaffar, A. and Rehman, N.U. and Khan, Y. (2016) Test of a new tip material for Langmuir probe diagnostic. Journal of Applied Mechanics and Technical Physics, 57 (2). pp. 211-218.

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Official URL: https://www.scopus.com/inward/record.uri?eid=2-s2....

Abstract

The objective of the work is to test a nickel�chrome alloy as a probe tip material for characterization of discharge plasmas. In order to meet the objective, a symmetric triple Langmuir probe diagnostic system and an associated driving circuit are designed and tested in an inductively coupled plasma generated by a 13.56-MHz radio frequency source coupled with an automated impedance match network. This probe is used to measure the electron temperature, electron number density, and ion saturation current as functions of the input power of the radio frequency source and the filling gas pressure. An increasing trend is noticed in the electron temperature and electron number density with an increase in the input power, whilst a decreasing trend is evident in these parameters with an increase in the nitrogen gas pressure. The overall inaccuracies in electron temperature and electron number density measurements are 5�12 and 3�13, respectively. © 2016, Pleiades Publishing, Ltd.

Item Type:Article
Impact Factor:cited By 1
Uncontrolled Keywords:Characterization; Electric discharges; Electrons; Impedance matching (electric); Inductively coupled plasma; Langmuir probes; Nitrogen; Probes; Radio waves, Discharge plasma; Electron number densities; Ion saturation current; Langmuir probe diagnostics; Nitrogen gas pressure; Radio frequency plasma; Radio frequency source; Triple langmuir probes, Electron temperature
ID Code:25581
Deposited By: Ms Sharifah Fahimah Saiyed Yeop
Deposited On:27 Aug 2021 09:18
Last Modified:27 Aug 2021 09:18

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