Optical and capacitive characterization of MEMS magnetic resonator

Mian, M.U. and Dennis, J.O. and Khir, M.H.B.M. and Ahmed, M.G.A. and Rabih, A.A.S. and Tang, T.B. (2016) Optical and capacitive characterization of MEMS magnetic resonator. IEICE Electronics Express, 13 (18).

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In this paper a Lorentz force driven Micro ELectro Mechanical Sytems (MEMS) resonator fabricated on PolyMUMP process with optical and capacitive sensing is presented. The resonator is designed by combining the two poly layers which result in an increase in the thickness of the resonator. Lorentz force generates lateral displacements at low driving voltages which are proportional to the magnetic field and the input current. A displacement of more than 9.8 μm was achieved with a magnetic field of 0.12 T and a driving current of 27 mA. Magnetic sensitivity of 1.41 V/Tin air was experimentally measured using permanent magnets and capacitive sensing circuitry. Optical results demonstrate the sensitivity values between 0.090 μm/mT and 0.074 μm m/mT. © IEICE 2016.

Item Type:Article
Impact Factor:cited By 1
Uncontrolled Keywords:Lorentz force; Magnetic fields; MEMS, Capacitive; Displacement; Lateral displacements; Low driving voltage; Magnetic sensitivity; Micro-electro-mechanical; MS3110; PolyMUMP, Resonators
ID Code:25482
Deposited By: Ms Sharifah Fahimah Saiyed Yeop
Deposited On:27 Aug 2021 13:02
Last Modified:27 Aug 2021 13:02

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