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Characterization of embedded micro-heater and temperature sensor in a CMOS-MEMS resonator for gas sensing

Ahmed, M.G.A. and Dennis, J.O. and Khair, M.H.M. and Rabih, A.A.S. and Mian, M.U. (2016) Characterization of embedded micro-heater and temperature sensor in a CMOS-MEMS resonator for gas sensing. International Journal of Applied Engineering Research, 11 (6). pp. 4381-4386.

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Official URL: https://www.scopus.com/inward/record.uri?eid=2-s2....


Item Type:Article
Impact Factor:cited By 3
ID Code:24297
Deposited By: Ms Sharifah Fahimah Saiyed Yeop
Deposited On:23 Aug 2021 14:02
Last Modified:23 Aug 2021 14:02

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